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In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing: 19-21 May, 1999, Edinburgh, Scotland (Proceedings Europt Series)

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Title: In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing: 19-21 May, 1999, Edinburgh, Scotland (Proceedings Europt Series)
by Kostas Amberiadis, Gudrun Kissinger, Katsuya Okumura, Seshu Pabbisetty, Larg H. Weiland, European Optical Society, Society of Photo-Optical Instrumentation Engineers, Science, European Commission Directorate-General Xii
ISBN: 0-8194-3223-7
Publisher: SPIE--The International Society for Optical Engineering
Pub. Date: April, 1999
Format: Hardcover
List Price(USD): $84.00
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