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Title: Microlithography Science and Technology by James R. Sheats, Bruce W. Smith ISBN: 0-8247-9953-4 Publisher: Marcel Dekker Pub. Date: 01 May, 1998 Format: Hardcover Volumes: 1 List Price(USD): $175.00

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Average Customer Rating: 5 (5 reviews)

Rating: 5
Summary: best book for the pro
Comment: this book consists almost everything u need to be a lithographer and is also concise and up-to-date!

also the price is not too high.

good book!

Rating: 5
Summary: E-beam Lithography
Comment: The book provides a great overview of the Electron Beam Lithography, which was the material of interest for me. Material is conveyed in great detail while the meaning of the material is not necessarily constricted to the experts. As an undergraduate student, I found the material readable. I was also able to understand most of the information well and as a result I believe I have a good base of knowledge about lithography. I would definitely recommend this book to other students.

Rating: 5
Summary: Great Text Book for Microlithography
Comment: The book give a very good overview of what microlithography is and it gives the recent advances in the field. I highly recommend it as something very good to have if your into the field of lithography and especially if you are a non engineer.

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Title: Principles of Lithography (SPIE PRESS Monograph Vol. PM97) by Harry J. Levinson ISBN: 0819440450 Publisher: SPIE-International Society for Optical Engine Pub. Date: July, 2001 List Price(USD): $72.00