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Title: Characterization and Metrology for Ulsi Technology : 1998 International Conference (AIP Conference Proceedings, Vol. 449) by David G. Seiler, A.C. Diebold, W.M. Bullis, T.J. Shaffner, R. McDonald, E.J. Walters, International Conference on Characterization and Metrology for Ulsi Te ISBN: 1-56396-753-7 Publisher: Springer Verlag Pub. Date: December, 1998 Format: Hardcover Volumes: 1 List Price(USD): $195.00 |
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