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Title: Modeling MEMS and NEMS by John A. Pelesko, David H. Bernstein ISBN: 1-58488-306-5 Publisher: CRC Press Pub. Date: 26 November, 2002 Format: Hardcover Volumes: 1 List Price(USD): $69.95

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Average Customer Rating: 5 (1 review)

Rating: 5
Summary: Finally a comprehensive book
Comment: This is among the finest books for modeling MEMS. Most other books give a mish-mash of fabrication and modeling, but you never figure out how to model!! This one is different. This is the gold standard for MEMS books to come.. I picked it up along with many other MEMS books from the library, never thought I would use it, but this is the ONLY book I use. Good even for the the advanced MEMS designer as a quick reference. But great for a new reader who wants to grasp the fundamental of modeling.

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