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1. |  | Title: Chemical Mechanical Planarization V by S. Seal, R. L. Opila, C. Reidsema Simpson, K. Sundaram, H. Huff, I. I. Suni ISBN: 1566773296 Publisher: Electrochemical Society Pub. Date: December, 2002 List Price: $72.00 Amazon.com Price: $72.00 |
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