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Cover ImageTitle: Introduction to Microlithography (Acs Professional Reference Book)
by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden, C. Grant Wilson
ISBN: 0841228485
Publisher: American Chemical Society
Pub. Date: December, 1994
List Price: $85.00
Amazon.com Price: $85.00
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Cover ImageTitle: Polymers for Microelectronics: Resists and Dielectrics (Acs Symposium Series, No 537)
by Larry F. Thompson, C. Grant Willson, Seiichi Tagawa, C. Grant Wilson
ISBN: 0841227217
Publisher: American Chemical Society
Pub. Date: January, 1994
List Price: $25.00
Amazon.com Price: $25.00
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Cover ImageTitle: Introduction to Microlithography: Theory, Materials, and Processing (Acs Symposium Series, 219)
by Larry F. Thompson
ISBN: 0841207755
Publisher: American Chemical Society
Pub. Date: May, 1983
List Price: $49.95
Amazon.com Price: $49.95

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