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1. |  | Title: Mems Reliability for Critical and Space Applications: 21-22 September 1999 Santa Clara, California (Proceedings of Spie, Volume 3880) by Russell A. Lawton, William M. Miller, Gisela Lin, Rajeshuni Ramesham, Society of Photo-Optical Instrumentation Engineers, Solid State Technology ISBN: 0819434779 Publisher: Society of Photo Optical Pub. Date: 01 August, 1999 List Price: $62.00 Amazon.com Price: $62.00 |
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