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1. |  | Title: Micromachining and Microfabrication Process Technology: 23-24 October, 1995, Austin, Texas (Proceedings of Spie--The International Society of Optical Engineering, V. 2639.) by Karen W. Markus, Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Society of Photo-Optical Instrumentation Engineers ISBN: 0819420050 Publisher: SPIE--The International Society for Optical Engineering Pub. Date: September, 1995 List Price: $66.00 Amazon.com Price: $66.00 |
| 2. |  | Title: Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France (Proceedings of Spie--The International Society for Optical Engineering, V. 3680.) by Bernard Bourtois, Selden B. Crary, Wolfgang Ehrfeld, Hiroyuki Fujita, Jean-Michel Karam, Karen W. Markus, Bernard Courtois ISBN: 0819431540 Publisher: SPIE--The International Society for Optical Engineering Pub. Date: March, 1999 List Price: $179.00 Amazon.com Price: $179.00 |
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