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Cover ImageTitle: Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France (Proceedings of Spie--The International Society for Optical Engineering, V. 3680.)
by Bernard Bourtois, Selden B. Crary, Wolfgang Ehrfeld, Hiroyuki Fujita, Jean-Michel Karam, Karen W. Markus, Bernard Courtois
ISBN: 0819431540
Publisher: SPIE-International Society for Optical Engine
Pub. Date: 01 March, 1999
List Price: $179.00
Amazon.com Price: $179.00

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